Title:
HIGHLY SENSITIVE FLOW SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/093685
Kind Code:
A1
Abstract:
The present invention relates to a highly sensitive flow sensor. The flow sensor comprises: first and second heaters which are disposed in an active layer formed on a silicon layer while being spaced apart from each other, so as to generate heat; a temperature sensor which is disposed between the first and second heaters in the active layer so as to detect the difference between temperatures at both ends thereof and convert the same into a voltage signal; and a control circuit which is formed in the active layer so as to transmit, to the first and second heaters, a feedback signal of the voltage signal received from the temperature sensor, wherein the control circuit comprises an electrical filter for receiving, as an input signal, the voltage signal from the temperature sensor and increasing, through filtering, the order of a signal output therefrom.
Inventors:
CHAE YOUNGCHEOL (KR)
CHANG KISEOK (KR)
LEE SANGWOO (KR)
RYU SUNGPIL (KR)
AHN JONG HYUN (KR)
LEE YONGJUNE (KR)
CHANG KISEOK (KR)
LEE SANGWOO (KR)
RYU SUNGPIL (KR)
AHN JONG HYUN (KR)
LEE YONGJUNE (KR)
Application Number:
PCT/KR2018/012524
Publication Date:
May 16, 2019
Filing Date:
October 23, 2018
Export Citation:
Assignee:
LG DISPLAY CO LTD (KR)
YONSEI UNIV INDUSTRY FOUNDATION YONSEI UIF (KR)
YONSEI UNIV INDUSTRY FOUNDATION YONSEI UIF (KR)
International Classes:
G01F25/00; G01F1/56
Domestic Patent References:
| WO2017087839A1 | 2017-05-26 |
Foreign References:
| US20070137297A1 | 2007-06-21 | |||
| JP2007248221A | 2007-09-27 | |||
| JP2007024589A | 2007-02-01 |
Other References:
WU ET AL.: "A 25mW CMOS Sensor for Wind and Temperature Measurement", IN: SEN SORS, 31 October 2011 (2011-10-31), pages 1261 - 1264, XP032093403, DOI: doi:10.1109/ICSENS.2011.6127204
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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