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Title:
HOLDING APPARATUS, LIGHT EXPOSURE APPARATUS, FLAT PANEL DISPLAY PRODUCTION METHOD, DEVICE PRODUCTION METHOD, AND HOLDING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/188274
Kind Code:
A1
Abstract:
Provided is a holding apparatus that holds an object in order to hold a substrate at a high degree of flatness. The holding apparatus comprises: an object-holding member that holds the object; a support member that supports the object-holding member; and a support apparatus that supports the object-holding member and the support member. The object-holding member is supported by the support member via a plurality of first supported parts on the object-holding member. The support member is supported by the support apparatus via a second supported part on the support member. The first supported parts are provided at a lower position than the second supported part.

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Inventors:
AOKI, Yasuo (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2019/010191
Publication Date:
October 03, 2019
Filing Date:
March 13, 2019
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
H01L21/68; G03F7/20
Domestic Patent References:
WO2015147039A12015-10-01
WO2001047001A12001-06-28
Foreign References:
JP2016186570A2016-10-27
JP2013538434A2013-10-10
JP2010258243A2010-11-11
JP2005297109A2005-10-27
JP2003163257A2003-06-06
JP2001297973A2001-10-26
Attorney, Agent or Firm:
KATAYAMA, Shuhei (Mitsui Sumitomo Marine Tepco Building, 6-1 Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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