Title:
HOLDING DEVICE AND METHOD FOR MANUFACTURING HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/105522
Kind Code:
A1
Abstract:
The purpose of the present invention is to suppress a variation in the amount of heat generation from a heat-generating resistor, said variation resulting from a variation in the resistance value of a power-supply connecting member. A holding device according to the present invention: is provided with a ceramic member formed of a ceramic sintered body a main constituent of which is an aluminum nitride, a metal heat-generating resistor disposed in the interior of the ceramic member, an electroconductive power-supply connecting member in contact with the heat-generating resistor, and an electroconductive power supply terminal electrically connected to the power-supply connecting member; and holds an object of interest on a surface of the ceramic member. At least a portion of the surface of the power-supply connecting member, said surface excluding the surface in contact with the heat-generating resistor and the surface connected to the power supply terminal, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb.
Inventors:
SAKAMAKI RYUNOSUKE (JP)
TAKAOKA KATSUYA (JP)
WATANABE HIROSHI (JP)
TAKAOKA KATSUYA (JP)
WATANABE HIROSHI (JP)
Application Number:
PCT/JP2019/044467
Publication Date:
May 28, 2020
Filing Date:
November 13, 2019
Export Citation:
Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
H05B3/02; H01L21/683; H05B3/10; H05B3/74
Domestic Patent References:
| WO2012057091A1 | 2012-05-03 |
Foreign References:
| JPH07135068A | 1995-05-23 |
Attorney, Agent or Firm:
ALPHA INTERNATIONAL PATENT FIRM (JP)
Download PDF: