Title:
HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/143288
Kind Code:
A1
Abstract:
A holding device according to an aspect of the present disclosure is provided with a holding substrate having a main surface on one side in the thickness direction, and has, inside the holding substrate, a heating unit that generates heat when supplied with electricity. The heating unit is provided with: a plurality of first heating elements disposed in a plane direction perpendicular to the thickness direction of the holding substrate; and a second heating element disposed closer to the main surface on one side in the thickness direction than the plurality of first heating elements. One of the plurality of first heating elements and the second heating element are electrically connected in series by a first via extending in the thickness direction in the holding substrate.
Inventors:
MIWA KANAME (JP)
Application Number:
PCT/JP2018/003251
Publication Date:
August 09, 2018
Filing Date:
January 31, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
H05B3/02; H01L21/02; H01L21/3065; H05B3/10; H05B3/74
Foreign References:
| JP2002016072A | 2002-01-18 | |||
| JP2000012195A | 2000-01-14 | |||
| JPH03159092A | 1991-07-09 | |||
| JP2016207777A | 2016-12-08 |
Attorney, Agent or Firm:
NAGOYA INTERNATIONAL PATENT FIRM (JP)
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