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Patent Searching and Data


Title:
HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159862
Kind Code:
A1
Abstract:
The present invention improves the controllability of the temperature distribution on the surface of a plate-shaped member in a holding device. The holding device is provided with: a plate-shaped member; a base member; a plurality of heater electrodes disposed on the plate-shaped member; a plurality of power supply terminals electrically connected to the heater electrodes; a bonding part for bonding the plate-shaped member and the base member; and an insulating member accommodated inside a terminal hole, wherein the holding device holds an object on the surface of the plate-shaped member. The plurality of power supply terminals provided in the holding device include: N (N is an integer of 2 or more) individual power supply terminals electrically connected respectively to N heater electrodes in the plurality of heater electrodes; and a common power supply terminal electrically connected to all of the N heater electrodes. The N individual power supply terminals are accommodated in a single terminal hole, in which the common power supply terminal is not accommodated, while insulated from each other by the insulating member. The common power supply terminal is accommodated in another terminal hole in which the individual power supply terminals are not accommodated.

Inventors:
MIWA Kaname (14-18, Takatsuji-cho, Mizuho-ku, Nagoya-sh, Aichi 25, 〒4678525, JP)
Application Number:
JP2019/004782
Publication Date:
August 22, 2019
Filing Date:
February 12, 2019
Export Citation:
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Assignee:
NGK SPARK PLUG CO., LTD. (14-18, Takatsuji-cho Mizuho-ku, Nagoya-sh, Aichi 25, 〒4678525, JP)
International Classes:
H01L21/683; H01L21/3065; H01L21/31; H02N13/00; H05B3/02; H05B3/74
Domestic Patent References:
WO2018016384A12018-01-25
Foreign References:
JP2017228649A2017-12-28
JP2017157617A2017-09-07
JP2017201669A2017-11-09
JP2017228360A2017-12-28
Attorney, Agent or Firm:
ALPHA INTERNATIONAL PATENT FIRM (Daiei Bldg. 3F, 1-11-20 Nishiki, Naka-ku, Nagoya-sh, Aichi 03, 〒4600003, JP)
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