Title:
HOLDING PAD AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/073956
Kind Code:
A1
Abstract:
A holding pad comprising a resin sheet which has a holding surface for holding an object to be polished, wherein the penetration speed, expressed in formula (1), of ethanol into the holding surface is 1.0 to 2.0 deg/s. (1): penetration speed = (C0-C20)/20. C0 is the contact angle of ethanol in relation to the holding surface immediately after a droplet of ethanol has fallen onto the holding surface, and C20 is the contact angle of ethanol in relation to the holding surface 20 seconds after the droplet of ethanol has fallen.
Inventors:
HIROTA KOJI (JP)
MAEDA TOSHIHIDE (JP)
KUME TAKAHIRO (JP)
MAEDA TOSHIHIDE (JP)
KUME TAKAHIRO (JP)
Application Number:
PCT/JP2018/037550
Publication Date:
April 18, 2019
Filing Date:
October 09, 2018
Export Citation:
Assignee:
FUJIBO HOLDINGS INC (JP)
International Classes:
B24B37/30; H01L21/304
Foreign References:
| JP2008168380A | 2008-07-24 | |||
| JP2016039180A | 2016-03-22 | |||
| JP2014079878A | 2014-05-08 | |||
| JP2011011304A | 2011-01-20 | |||
| JP2012071399A | 2012-04-12 | |||
| JP2016055385A | 2016-04-21 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Download PDF: