Title:
HORIZONTAL ARTICULATED ROBOT AND SUBSTRATE TRANSFER SYSTEM COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2021/157552
Kind Code:
A1
Abstract:
In the present invention, a robot 100 comprises: a base 1; an arm 3 constituted by a plurality of links 30 rotatably connected to the base 1 in the horizontal direction and rotatably connected to each other in the horizontal direction; and a hand 8 rotatably connected to the arm 3 in the horizontal direction. A first link 31, which is at least one link of the plurality of links 30, has an internal space 40 formed therein. The first link 31 has a partition wall 45 that partitions the internal space 40 into two storage chambers, i.e., a first storage chamber 40A and a second storage chamber 40B, in which parts are stored.
Inventors:
MATSUOKA JUNICHI
YAMASAKI MASARU
TANAKA YUICHIRO
YAMASAKI MASARU
TANAKA YUICHIRO
Application Number:
PCT/JP2021/003669
Publication Date:
August 12, 2021
Filing Date:
February 02, 2021
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J9/06; H01L21/677
Foreign References:
| JP2013049128A | 2013-03-14 | |||
| JP2017503666A | 2017-02-02 | |||
| JP2007038360A | 2007-02-15 | |||
| JP2020011303A | 2020-01-23 |
Attorney, Agent or Firm:
TERAZONO Kenichi et al. (JP)
Download PDF:
Previous Patent: COMPOSITION FOR LITHOGRAPHY AND PATTERN-FORMING METHOD
Next Patent: ROBOT, AND SUBSTRATE TRANSPORTATION SYSTEM COMPRISING SAME
Next Patent: ROBOT, AND SUBSTRATE TRANSPORTATION SYSTEM COMPRISING SAME