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Title:
HUMIDIFICATION-TYPE HIGH-SENSITIVITY/HIGH-SELECTIVITY AMMONIA DETECTION METHOD USING NANOMECHANICAL SENSOR, AND DETECTION DEVICE THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/255580
Kind Code:
A1
Abstract:
The purpose of the present invention is to detect ammonia in a highly sensitive and highly selective manner by using a nanomechanical sensor and a structure that it as simple as possible. In the ammonia detection method according to one embodiment of the present invention, a sample gas possibly containing ammonia is supplied to a nanomechanical sensor that uses poly(methyl vinyl ether-alt-maleic anhydride) as a receptor layer material to detect stress or displacement, and the presence or absence of ammonia or the content amount of ammonia in the sample gas is detected on the basis of an output signal from the nanomechanical sensor. The ammonia detection method is characterized in that the sample gas is a humidified sample gas for which the relative humidity is controlled.

Inventors:
IMAMURA GAKU (JP)
MINAMI KOSUKE (JP)
SHIBA KOTA (JP)
YOSHIKAWA GENKI (JP)
Application Number:
PCT/JP2020/018649
Publication Date:
December 24, 2020
Filing Date:
May 08, 2020
Export Citation:
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Assignee:
NAT INST MATERIALS SCIENCE (JP)
International Classes:
G01L1/00; G01N5/02
Domestic Patent References:
WO2011148774A12011-12-01
WO2018221283A12018-12-06
Foreign References:
JP2009250896A2009-10-29
JP2019015675A2019-01-31
US20040040841A12004-03-04
JP2020003362A2020-01-09
JP2019174268A2019-10-10
JP2016128776A2016-07-14
Other References:
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P. SPANEL ET AL., J. BREATH RES., vol. 1, 2007
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LEE SEUNG-WOO, VOLATILE BIOMARKER ANALYSIS AND ADVANCED GAS-SENSING INSTRUMENTS, 2018, pages 189
SHU TSUBOI ET AL., FUJITSU, vol. 68, 2017, pages 59
SHIRO IKEDA ET AL., KANAGAWA PREFECTURE MANUFACTURING TECHNOLOGY EXCHANGE MEETING, vol. 3101, 2014
M. BENDAHAN ET AL., SENS. AND ACTUATORS B, vol. 84, 2002, pages 6
Y. ZHENG ET AL., J. PHYS. CHEM. C, vol. 115, 2011, pages 2014
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See also references of EP 3988913A4
Attorney, Agent or Firm:
TSUZUKI Noriaki (JP)
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