HUMIDITY DETECTION DEVICE

WIPO Patent Application WO/2019/181771

A1

A humidity detection device according to one aspect of the present invention is able to perform stable measurement by suppressing drift of a measurement value in humidity detection. The humidity detection device is provided with: an insulation layer provided on a main surface of a base material; a reference part provided on the insulation layer; a detection part provided on the insulation layer so as to be juxtaposed with the reference part; and common wiring provided between the reference part and the detection part. The reference part has: a reference first electrode provided on the main surface of the base material; a reference dielectric part provided so as to encircle the reference first electrode; and a reference second electrode provided so as to encircle the reference dielectric part. The detection part has: a detection first electrode provided on the main surface of the base material; a detection dielectric part provided so as to encircle the detection first electrode; and a detection second electrode which is provided so as to encircle the detection dielectric part and in which a through hole is provided. The common wiring is provided so as to be electrically conductive to the reference first electrode and the detection first electrode by passing through the insulation layer.

TANAHASHI SAKIKO (JP)
MIYATAKE AKIRA (JP)
KOBAYASHI TOSHIHIRO (JP)
ONODERA HIROSHI (JP)
SATO KIYOSHI (JP)
OKAWA HISANOBU (JP)

PCT/JP2019/010787

September 26, 2019

March 15, 2019

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ALPS ALPINE CO LTD (JP)

G01N27/22

WO2010113711A1

2010-10-07

JP2017067445A	2017-04-06
JPS5437795A	1979-03-20

OKUBO, Katsuyuki (JP)

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