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Patent Searching and Data


Title:
HUMIDITY SENSOR AND HUMIDITY SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/139142
Kind Code:
A1
Abstract:
Provided is a humidity sensor that makes highly accurate humidity detection possible even if the applied voltage changes, an arbitrary voltage is applied, or thermistors having different characteristics are used. A humidity sensor according to the present invention is provided with a detection chamber part 2, a first standard chamber part 3, a separate gas chamber part 4, and a second standard chamber part 5 that are disposed so as to be close to each other. The detection chamber part is provided with a detection container having a through hole through which outside air can be introduced into the internal space of the detection container and a detection thermistor 7 installed inside the detection container. The first standard chamber part is provided with a first standard container having dry air sealed therein and a first standard thermistor 9 installed inside the first standard container. The second standard chamber part is provided with a second standard container having dry air sealed therein and a second standard thermistor 13 installed inside the second standard container. The separate gas chamber part is provided with a separate gas container having a gas sealed therein that has a different thermal conductivity from that of said dry air and a separate gas thermistor 11 installed inside the separate gas container.

Inventors:
ODA YASUHIRO (JP)
HIRANO SHINGO (JP)
MIYAZAWA TAKASHI (JP)
Application Number:
PCT/JP2017/046407
Publication Date:
August 02, 2018
Filing Date:
December 25, 2017
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
G01N27/18; G01N25/64
Foreign References:
JP2016014622A2016-01-28
US20050265422A12005-12-01
JP2004504598A2004-02-12
Attorney, Agent or Firm:
TAKAOKA Ryoichi (JP)
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