Title:
HUMIDITY SENSOR AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2019/131302
Kind Code:
A1
Abstract:
The present disclosure addresses the problem of providing: a humidity sensor configured for long-term stabilization of operations, where, when a moisture-sensitive film, after being formed, has contracted due to temporal transition or due to changes in environmental temperature, etc., gaps formed in a second electrode (upper electrode) are prevented from closing; and a manufacturing method for the same. As a means for solving this problem, a humidity sensor (1) comprises: a base material (2); a first electrode (3); a moisture-sensitive film (4) formed of a polymer material; and a second electrode (5). The moisture-sensitive film (4) has protrusions (41) formed on an upper surface (4a) thereof at prescribed intervals (W1), and gaps (G1) formed in the second electrode (5) have a configuration where gaps (G12) on the lower surface side of the second electrode (5) are larger than gaps (G11) on the upper surface side of the second electrode.
Inventors:
MORIMITSU NORIMASA (JP)
Application Number:
PCT/JP2018/046456
Publication Date:
July 04, 2019
Filing Date:
December 18, 2018
Export Citation:
Assignee:
RUBYCON CORP (JP)
International Classes:
G01N27/22
Foreign References:
| JPS5946547A | 1984-03-15 | |||
| JP2006349667A | 2006-12-28 | |||
| JP2010180408A | 2010-08-19 | |||
| JP2004290750A | 2004-10-21 |
Attorney, Agent or Firm:
WATANUKI PATENT SERVICE BUREAU (JP)
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