Title:
HUMIDITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/062379
Kind Code:
A1
Abstract:
The humidity sensor according to the present invention has a lower electrode formed on a substrate, a first moisture-sensitive film for covering the lower electrode, an upper electrode which is formed on the first moisture-sensitive film and has a predetermined open pattern comprising a plurality of open parts, and a second moisture-sensitive film for covering the upper electrode, the second moisture-sensitive film being connected to the first moisture-sensitive film in the open parts of the upper electrode.
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Inventors:
NAKANE TAKETOMO (JP)
Application Number:
PCT/JP2017/035198
Publication Date:
April 05, 2018
Filing Date:
September 28, 2017
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD (JP)
NAKANE TAKETOMO (JP)
NAKANE TAKETOMO (JP)
International Classes:
G01N27/22
Domestic Patent References:
WO2012046501A1 | 2012-04-12 | |||
WO2011065507A1 | 2011-06-03 |
Foreign References:
JPH04155253A | 1992-05-28 | |||
US20150185176A1 | 2015-07-02 | |||
JPH10221288A | 1998-08-21 | |||
JPS5547296B2 | 1980-11-28 | |||
JP2013133264A | 2013-07-08 | |||
JP2016195036A | 2016-11-17 | |||
JP2017052768A | 2017-03-16 |
Other References:
See also references of EP 3502680A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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