Title:
HYBRID LASER BEAM MACHINING DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/023621
Kind Code:
A1
Abstract:
A hybrid laser beam machining device, wherein a working table (3) holding an object (2)
to be worked is stored in a chamber (4) in an airtight state and a working head (9)
jetting a liquid column (W) and guiding a laser beam (L) to the liquid column (W)
is fixed onto the upper surface of the chamber (4). An exhaust means (5) in which an
oil rotary pump (11) and a diffusion pump (12) are arranged in parallel with each
other is connected to the chamber (4), and the inside of the chamber (4) is brought
to a vacuum by starting the diffusion pump (12) after the oil rotary pump (11) is
started. Since the inside of the chamber (4) is brought into a vacuum state, an
air flow does not occur around the liquid column (W) jetted from the working head
(9) and the disturbance of the liquid column (W) due to the disturbance of the air
flow can be suppressed. As a result, the liquid column with a small diameter can
be jetted in a stable state.
Inventors:
KOSEKI RYOJI (JP)
SASAKI MOTOI (JP)
SASAKI MOTOI (JP)
Application Number:
PCT/JP2006/313752
Publication Date:
March 01, 2007
Filing Date:
July 11, 2006
Export Citation:
Assignee:
SHIBUYA KOGYO CO LTD (JP)
KOSEKI RYOJI (JP)
SASAKI MOTOI (JP)
KOSEKI RYOJI (JP)
SASAKI MOTOI (JP)
International Classes:
B23K26/14; B23K26/12; B26F3/00
Foreign References:
| JP2001321977A | 2001-11-20 | |||
| JPS6464799A | 1989-03-10 | |||
| JPH03178800A | 1991-08-02 | |||
| JPH02232199A | 1990-09-14 | |||
| JPH04201200A | 1992-07-22 |
Other References:
See also references of EP 1918061A1
Attorney, Agent or Firm:
KANZAKI, Shin'ichiro (5-5 Kyobashi 1-chom, Chuo-ku Tokyo 31, JP)
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