Title:
HYDROGEN DETECTION DEVICE AND CONTROL METHOD FOR HYDROGEN DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/047759
Kind Code:
A1
Abstract:
This hydrogen detection device (10) comprises a hydrogen sensor (100) and a detection circuit (200), wherein: the hydrogen sensor (100) includes a first electrode (103), a second electrode (106), a metal oxide layer (104), a first insulating film (insulating films 107a to 107c), a first terminal (TE1), and a second terminal (TE2) which are connected via a via (108) to the other surface of the second electrode (106) facing the main surface thereof, and a third terminal (BE) connected via the via (108) to the other surface of the first electrode (103) facing the main surface thereof; and the detection circuit (200) includes ammeters (230 and 231) for measuring (1) a first resistance value between the first terminal (TE1) and the second terminal (TE2) and (2) a second resistance value between at least one among the first terminal (TE1) and the second terminal (TE2) and the third terminal (BE), and a control circuit (210) that selectively outputs either the first resistance value or the second resistance value.
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Inventors:
KAWAI KEN
HOMMA KAZUNARI
KATAYAMA KOJI
HOMMA KAZUNARI
KATAYAMA KOJI
Application Number:
PCT/JP2022/026591
Publication Date:
March 30, 2023
Filing Date:
July 04, 2022
Export Citation:
Assignee:
NUVOTON TECH CORPORATION JAPAN (JP)
International Classes:
G01N27/04; G01N27/12
Domestic Patent References:
| WO2021210453A1 | 2021-10-21 |
Foreign References:
| JP2009103605A | 2009-05-14 | |||
| JP2017181494A | 2017-10-05 | |||
| JP2017215312A | 2017-12-07 | |||
| JP2017198661A | 2017-11-02 | |||
| US20200003718A1 | 2020-01-02 | |||
| US5985673A | 1999-11-16 |
Attorney, Agent or Firm:
NII, Hiromori et al. (JP)
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