Title:
HYDROGEN SENSOR AND HYDROGEN DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/179400
Kind Code:
A1
Abstract:
The present invention provides a low-cost hydrogen sensor which has high sensitivity and low hysteresis characteristics, while having a simple configuration. The present invention shows that a membrane-type surface stress sensor, which comprises an amorphous palladium copper silicon alloy as a sensitive membrane, has a low hysteresis and is capable of sensing a nitrogen gas to which hydrogen is added at an extremely low concentration of 0.25 ppm and a pure nitrogen gas at a sufficiently high S/N ratio.
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Inventors:
YAKABE TARO (JP)
IMAMURA GAKU (JP)
YOSHIKAWA GENKI (JP)
NAKAMURA AKIKO (JP)
IMAMURA GAKU (JP)
YOSHIKAWA GENKI (JP)
NAKAMURA AKIKO (JP)
Application Number:
PCT/JP2020/005694
Publication Date:
September 10, 2020
Filing Date:
February 14, 2020
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE (JP)
International Classes:
G01N5/02; G01N19/00; G01N33/00
Domestic Patent References:
| WO2013157581A1 | 2013-10-24 | |||
| WO2013157581A1 | 2013-10-24 | |||
| WO2011148774A1 | 2011-12-01 |
Foreign References:
| JP2006507511A | 2006-03-02 | |||
| JP2011232141A | 2011-11-17 | |||
| CN109342558A | 2019-02-15 | |||
| EP2169400A1 | 2010-03-31 | |||
| JP2019100705A | 2019-06-24 | |||
| JP2017155808A | 2017-09-07 | |||
| JP2019035613A | 2019-03-07 | |||
| JP2015045657A | 2015-03-12 | |||
| JP2008008869A | 2008-01-17 | |||
| JP2009139106A | 2009-06-25 | |||
| JP2010181282A | 2010-08-19 | |||
| JP2017215170A | 2017-12-07 |
Other References:
S. OKUYAMA ET AL., JPN. J. APPL. PHYS., vol. 39, 2000, pages 3584
YEN-I CHOU ET AL., TAMKANG J. SCI. ENG., vol. 10, 2007, pages 159
SUSUMU KAJITA, PANASONIC TECHNICAL J., vol. 61, 2015, pages 61
HIROAKI YAMAZAKI ET AL., IEEJ TRANS. SENS. MICRO., vol. 138, 2018, pages 312
G. YOSHIKAWA ET AL., NANO LETT., vol. 11, 2011, pages 1044
G. YOSHIKAWA ET AL., SENSORS, vol. 12, 2012, pages 15873
G. IMAMURA ET AL., ANAL. SCI., vol. 32, 2016, pages 1189
G. YOSHIKAWA, APPLIED PHYSICS LETTERS, vol. 98, 2011, pages 173502
See also references of EP 3936852A4
YEN-I CHOU ET AL., TAMKANG J. SCI. ENG., vol. 10, 2007, pages 159
SUSUMU KAJITA, PANASONIC TECHNICAL J., vol. 61, 2015, pages 61
HIROAKI YAMAZAKI ET AL., IEEJ TRANS. SENS. MICRO., vol. 138, 2018, pages 312
G. YOSHIKAWA ET AL., NANO LETT., vol. 11, 2011, pages 1044
G. YOSHIKAWA ET AL., SENSORS, vol. 12, 2012, pages 15873
G. IMAMURA ET AL., ANAL. SCI., vol. 32, 2016, pages 1189
G. YOSHIKAWA, APPLIED PHYSICS LETTERS, vol. 98, 2011, pages 173502
See also references of EP 3936852A4
Attorney, Agent or Firm:
TSUZUKI Noriaki (JP)
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