Title:
HYDROGEN SENSOR PRODUCTION METHOD AND HYDROGEN SENSOR PRODUCED THEREBY
Document Type and Number:
WIPO Patent Application WO/2017/030421
Kind Code:
A1
Abstract:
A hydrogen sensor production method and a hydrogen sensor produced thereby are provided. In particular, the hydrogen sensor can be produced by: forming a single self-assembly layer on a stamp substrate provided with a nanoline pattern concavo-convex part; depositing a metallic thin-film layer on the single self-assembly layer; then disposing the stamp substrate on a sensor substrate such that a polymer layer coated on the upper part of the flexible sensor substrate and a metallic thin film deposited on the concavo-convex part come into contact with one another; performing pressure and heat treatment on the stamp substrate; then removing the stamp substrate so as to transfer a metallic nanoribbon array having nanogaps to the sensor substrate; and forming a first electrode and a second electrode at either end of the transferred metallic nanoribbon array.
Inventors:
JUNG GUNYOUNG (KR)
PARK YUSIN (KR)
PARK YUSIN (KR)
Application Number:
PCT/KR2016/009200
Publication Date:
February 23, 2017
Filing Date:
August 19, 2016
Export Citation:
Assignee:
GWANGJU INST SCIENCE & TECH (KR)
International Classes:
G01N27/407; H01L21/28; B82Y15/00
Foreign References:
| KR20130010160A | 2013-01-28 | |||
| KR20110136340A | 2011-12-21 |
Other References:
LEE, KYEONGMI ET AL.: "Nonaqueous Nanoscale Metal Transfer by Controlling the Stickiness of Organic Film", LANGMUIR, vol. 24, no. 16, 19 July 2008 (2008-07-19), XP055364411
JEONG, JAE WON ET AL.: "High-Resolution Nanotransfer Printing Applicable to Diverse Surfaces via Interface-Targeted Adhesion Switching", NATURE COMMUNICATION, vol. 5, no. 5387, 10 November 2014 (2014-11-10), XP055254707
JANG, BYUNGJUN ET AL.: "Palladium Nanogap-Based H2sensors on a Pattemed Elastomeric Substrate Using Nano Imprint Lithography", SENSORS AND ACTUATORS B 221, 3 July 2015 (2015-07-03), XP029282842
JEONG, JAE WON ET AL.: "High-Resolution Nanotransfer Printing Applicable to Diverse Surfaces via Interface-Targeted Adhesion Switching", NATURE COMMUNICATION, vol. 5, no. 5387, 10 November 2014 (2014-11-10), XP055254707
JANG, BYUNGJUN ET AL.: "Palladium Nanogap-Based H2sensors on a Pattemed Elastomeric Substrate Using Nano Imprint Lithography", SENSORS AND ACTUATORS B 221, 3 July 2015 (2015-07-03), XP029282842
Attorney, Agent or Firm:
E-SANG PATENT & TRADEMARK LAW FIRM (KR)
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