Title:
HYDROGEN SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/047728
Kind Code:
A1
Abstract:
The present invention pertains to a hydrogen sensor for measuring hydrogen concentration and provides a hydrogen sensor which has high sensitivity and which is excellent in mass productivity. The hydrogen sensor according to the present invention is characterized in that: at least a first crystal oscillator (2) and a second crystal oscillator (3) are formed on a crystal plate (1); hydrogen-reacting catalyst layers (4) formed of platinum coating films (8) made of platinum black are formed on both sides of the first crystal oscillator; a hydrogen-non-reacting layer (5) is formed on the second crystal oscillator; and hydrogen is oxidized by the hydrogen-reacting catalyst layers, the temperature of the first crystal oscillator increased by the oxidation heat is measured as a change in the natural frequency of the first crystal oscillator by using, as a reference, the natural frequency of the second crystal oscillator, and thereby, hydrogen concentration is measured.
Inventors:
UEDA TOSHITSUGU (JP)
OIGAWA HIROSHI (JP)
OIGAWA HIROSHI (JP)
Application Number:
PCT/JP2016/077367
Publication Date:
March 23, 2017
Filing Date:
September 16, 2016
Export Citation:
Assignee:
KOA CORP (JP)
International Classes:
G01N25/22
Foreign References:
| JP2010256157A | 2010-11-11 | |||
| JP2009042097A | 2009-02-26 | |||
| JP2008233030A | 2008-10-02 | |||
| JP2008275588A | 2008-11-13 | |||
| JP2008292387A | 2008-12-04 | |||
| JP2008039658A | 2008-02-21 | |||
| JPS5594558U | 1980-06-30 |
Attorney, Agent or Firm:
AOKI, Hiroyoshi et al. (JP)
Download PDF: