Title:
HYDROGEN SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/017748
Kind Code:
A1
Abstract:
A hydrogen sensor (100) comprises: a planar first electrode (103); a second electrode (106) that is planar, that is provided so as to oppose the first electrode (103), and that has an exposed section (106e) exposed to a gas including hydrogen; a metal oxide layer (104) that is sandwiched between the two opposing surfaces of the first electrode (103) and the second electrode (106) and that has a resistance value that changes as a result of the exposed section (106e) coming into contact with the gas; a first terminal (111), a second terminal (112), and a heat dissipation unit (130) that are provided at a distance from each other; one or more first vias (121) that are electrically connected to the first terminal (111) and the second electrode (106), and that are provided above the second electrode (106); one or more second vias (122) that are electrically connected to the second terminal (112) and the second electrode (106) and that are provided above the second electrode (106); and one or more third vias (123) that are in contact with the heat dissipation unit (130) and that are provided above the second electrode (106).
Inventors:
HOMMA KAZUNARI
ITO SATORU
KATAYAMA KOJI
ITO SATORU
KATAYAMA KOJI
Application Number:
PCT/JP2022/029406
Publication Date:
February 16, 2023
Filing Date:
July 29, 2022
Export Citation:
Assignee:
NUVOTON TECH CORPORATION JAPAN (JP)
International Classes:
G01N27/12
Domestic Patent References:
| WO2019044256A1 | 2019-03-07 | |||
| WO2020213223A1 | 2020-10-22 | |||
| WO2020179226A1 | 2020-09-10 | |||
| WO2021210453A1 | 2021-10-21 |
Foreign References:
| JPS5958348A | 1984-04-04 | |||
| JP2017198660A | 2017-11-02 | |||
| JP2017173307A | 2017-09-28 | |||
| JP2017181494A | 2017-10-05 | |||
| JP2017215312A | 2017-12-07 | |||
| JP2022012739A | 2022-01-17 |
Attorney, Agent or Firm:
NII, Hiromori et al. (JP)
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