HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT, AND GAS RECOVERING METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE

Title:

HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT, AND GAS RECOVERING METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE

Document Type and Number:

WIPO Patent Application WO/2001/057409

Kind Code:

A1

Abstract:

A hydrostatic gas bearing for use in vacuum in which increase in the quantity of gas being discharged during movement of a moving body is reduced by subjecting the surface of the guide shaft of a fixed body and/or the moving body to processing for reducing adhesion of gas molecules, e.g. by coating the surface (s) with a material having a low adhesion probability of gas molecule.

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Inventors:

SHINOHARA SHINJI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)

Application Number:

PCT/JP2001/000582

Publication Date:

August 09, 2001

Filing Date:

January 29, 2001

Export Citation:

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Assignee:

TOTO LTD (JP)
SHINOHARA SHINJI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)

International Classes:

F16C29/02; F16C32/06; G03F7/20; (IPC1-7): F16C32/06

Foreign References:

JPH02212624A	1990-08-23
JPH0221328U	1990-02-13

Other References: