Title:
HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT, AND GAS RECOVERING METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE
Document Type and Number:
WIPO Patent Application WO/2001/057409
Kind Code:
A1
Abstract:
A hydrostatic gas bearing for use in vacuum in which increase in the quantity of gas being discharged during movement of a moving body is reduced by subjecting the surface of the guide shaft of a fixed body and/or the moving body to processing for reducing adhesion of gas molecules, e.g. by coating the surface (s) with a material having a low adhesion probability of gas molecule.
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Inventors:
SHINOHARA SHINJI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)
Application Number:
PCT/JP2001/000582
Publication Date:
August 09, 2001
Filing Date:
January 29, 2001
Export Citation:
Assignee:
TOTO LTD (JP)
SHINOHARA SHINJI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)
SHINOHARA SHINJI (JP)
TSUDA TAKUMA (JP)
HAYASHIDA TAKESHI (JP)
International Classes:
F16C29/02; F16C32/06; G03F7/20; (IPC1-7): F16C32/06
Foreign References:
JPH02212624A | 1990-08-23 | |||
JPH0221328U | 1990-02-13 |
Other References:
See also references of EP 1256734A4
Attorney, Agent or Firm:
Koyama, Yuu (Kojimachi Chiyada-ku Tokyo, JP)
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