Title:
HYPERBRANCHED POLYMER, PROCESS FOR PRODUCING THE SAME AND RESIST COMPOSITION CONTAINING THE HYPERBRANCHED POLYMER
Document Type and Number:
WIPO Patent Application WO/2005/061566
Kind Code:
A1
Abstract:
A hyperbranched polymer suitable as a polymer material for use in nanofabrication whose leading part is played by photolithography. There is provided a hyperbranched polymer characterized by having at its polymer molecular end an acid decomposable group, such as p-tert-butoxystyrene, bonded to a core moiety formed by living radical polymerization of chloromethylstyrene, etc.
Inventors:
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
SUZUKI KAORU (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
Application Number:
PCT/JP2004/019689
Publication Date:
July 07, 2005
Filing Date:
December 22, 2004
Export Citation:
Assignee:
LION CORP (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
KANEKO YUKIHIRO (JP)
SUZUKI KAORU (JP)
TAMURA MINORU (JP)
KUBO YOSHIYASU (JP)
International Classes:
C08F212/14; G03F7/039; (IPC1-7): C08F212/14; G03F7/039; H01L21/027
Foreign References:
| JP2004133393A | 2004-04-30 | |||
| JP2004004614A | 2004-01-08 | |||
| JP2001114825A | 2001-04-24 | |||
| JP2000347412A | 2000-12-15 | |||
| JP2000344836A | 2000-12-12 |
Attorney, Agent or Firm:
Kumakura, Yoshio (Shin-Tokyo Bldg. 3-1, Marunouchi 3-chom, Chiyoda-ku Tokyo 55, JP)
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