ILLUMINATING METHOD, EXPOSING METHOD, AND DEVICE FOR THEREFOR

Title:

ILLUMINATING METHOD, EXPOSING METHOD, AND DEVICE FOR THEREFOR

Document Type and Number:

WIPO Patent Application WO/2004/006308

Kind Code:

A1

Abstract:

An exposing device characterized by comprising an illuminating optical system having a light source array where discrete light sources are arranged one- or two-dimensionally, a focusing optical system for focusing the light beams emitted from the light sources of the light source array, and a light integrator composed of a plurality of rod lenses for spatially decomposing the light beams focused by the focusing optical system and generating a plurality of pseudo-secondary light sources and having a ratio r₁/r₀ of 0.8 to 1.2 where r₁ is the aspect ration of the cross section vertical to the optical axis of each rod lens and r₀ is the aspect ratio of an area (21) to be illuminated, and a condenser lens for combining the light beams from the pseudo-secondary light sources generated by the light integrator and illuminating with the light the area having a pattern to be exposed; and a projection optical system for projecting the light transmitted through or reflected from the pattern illuminated by the illuminating system and to be exposed onto the area on the object to be exposed so as to expose the area to the light. An exposing method is also disclosed.

Inventors:

OSHIDA YOSHITADA (JP)
MARUYAMA SHIGENOBU (JP)
KOBAYASHI KAZUO (JP)
NAITOU YOSHITATU (JP)
OSAKA YOSHIHISA (JP)

Application Number:

PCT/JP2003/008399

Publication Date:

January 15, 2004

Filing Date:

July 02, 2003

Export Citation:

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Assignee:

HITACHI LTD (JP)
HITACHI VIA MECHANICS LTD (JP)
OSHIDA YOSHITADA (JP)
MARUYAMA SHIGENOBU (JP)
KOBAYASHI KAZUO (JP)
NAITOU YOSHITATU (JP)
OSAKA YOSHIHISA (JP)

International Classes:

G02B3/00; G02B19/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B3/00; G02B19/00; G03F7/20

Foreign References:

JP2001085308A	2001-03-30
JPH0545605A	1993-02-26
JP2000223408A	2000-08-11
JPH08330212A	1996-12-13
JP2003270585A	2003-09-25

Other References: