Title:
ILLUMINATING OPTICAL SYSTEM, EXPOSURE SYSTEM AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2005/010963
Kind Code:
A1
Abstract:
An illuminating optical system capable of preventing a change in the polarized status of a linearly polarized light passing through a light transmitting member formed of a cubic-system crystal material such as fluorite. An illuminating optical system comprising a light source unit (1) for suppling a linearly polarized light to illuminate surfaces (M, W) to be illuminated with a light from the light source unit. The system is provided with a polarized status switching means (10, 20) disposed on a light path between the light source unit and the surfaces to be illuminated, for switching the polarized status of a light, that illuminates the surfaces to be illuminated, between a linearly polarized status and a non-linearly polarized status. The polarized status switching means has a phase member (10) for changing the polarization surface of an incident linearly polarized light as needed, and a depolarizer (20) for depolarizing an incident linearly polarized light as needed. A phase advancing axis direction in association with the double refraction variation of a light transmitting member formed of fluorite is so set as to almost agree with or cross almost perpendicularly to the field vibration direction of a linearly polarized light incident to a light transmitting member.
Inventors:
MURAMATSU KENICHI (JP)
KOMINE NORIO (JP)
TANITSU OSAMU (JP)
TANAKA HIROHISA (JP)
KOMINE NORIO (JP)
TANITSU OSAMU (JP)
TANAKA HIROHISA (JP)
Application Number:
PCT/JP2004/009128
Publication Date:
February 03, 2005
Filing Date:
June 29, 2004
Export Citation:
Assignee:
NIKON CORP (JP)
MURAMATSU KENICHI (JP)
KOMINE NORIO (JP)
TANITSU OSAMU (JP)
TANAKA HIROHISA (JP)
MURAMATSU KENICHI (JP)
KOMINE NORIO (JP)
TANITSU OSAMU (JP)
TANAKA HIROHISA (JP)
International Classes:
G03F7/20; (IPC1-7): H01L21/027; G02B27/28; G02B19/00
Foreign References:
| JPH05109601A | 1993-04-30 | |||
| JP2003043223A | 2003-02-13 | |||
| JP2003161708A | 2003-06-06 | |||
| JP2003131002A | 2003-05-08 | |||
| JPH01147516A | 1989-06-09 | |||
| JP2003161882A | 2003-06-06 |
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasacho 2-chom, Chiyoda-ku Tokyo, JP)
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