Title:
ILLUMINATING OPTICS, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/077404
Kind Code:
A1
Abstract:
These illuminating optics, which use light from a light source to illuminate a reticle surface, are provided with the following: a spatial light modulator that has a plurality of mirror elements arranged within a prescribed arrangement plane; a first polarization control system that is positioned upstream of said arrangement plane and controls the polarization-state distribution of light incident upon the mirror elements such that the ratio between vertical polarization (which is p polarization when the light is incident upon the arrangement plane) and horizontal polarization can be varied; and a second polarization control system that is positioned downstream of the arrangement plane and is capable of setting the polarization-state distribution of the light heading towards the reticle surface via the mirror elements to a distribution that includes a diagonal-polarization component. This allows a high degree of freedom with respect to polarization-state changes.
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Inventors:
SHIGEMATSU KOJI (JP)
Application Number:
PCT/JP2013/081124
Publication Date:
May 22, 2014
Filing Date:
November 19, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01L21/027; G02B5/30; G02B17/08; G02B19/00; G03F7/20
Domestic Patent References:
| WO2012169089A1 | 2012-12-13 |
Foreign References:
| JP2011040646A | 2011-02-24 | |||
| JP2011199285A | 2011-10-06 | |||
| JP2009111223A | 2009-05-21 | |||
| JP2010087389A | 2010-04-15 |
Attorney, Agent or Firm:
OMORI SATOSHI (JP)
Omori 聡 (JP)
Omori 聡 (JP)
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