Title:
ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/096453
Kind Code:
A1
Abstract:
Disclosed is an illumination optical device which illuminates a surface to be illuminated using optical flux. The illumination optical device comprises: an optical splitter which divides optical flux into a plurality of optical fluxes having mutually different polarisation states; a spatial light modulator which has a plurality of optical elements that are arranged on a first optical path along which a first optical flux from among the plurality of optical fluxes propagates and/or a second optical path along which a second optical flux from among the plurality of optical fluxes propagates, the optical elements being arranged two-dimensionally and driven individually; and a controller which controls the spatial light modulator and combines at least part of the first optical flux and the second optical flux. The surface to be illuminated can be illuminated by optical flux having a distribution of various polarisation states without the illumination optical device becoming either too complex or too large.
Inventors:
FUJII TORU (JP)
Application Number:
PCT/JP2011/052184
Publication Date:
August 11, 2011
Filing Date:
February 02, 2011
Export Citation:
Assignee:
NIKON CORP (JP)
FUJII TORU (JP)
FUJII TORU (JP)
International Classes:
H01L21/027; G02B19/00; G02B26/08; G03F7/20
Domestic Patent References:
| WO2009150871A1 | 2009-12-17 | |||
| WO2009125511A1 | 2009-10-15 | |||
| WO2009087805A1 | 2009-07-16 |
Foreign References:
| JP2009105396A | 2009-05-14 | |||
| JP2002353105A | 2002-12-06 |
Attorney, Agent or Firm:
OMORI SATOSHI (JP)
Omori 聡 (JP)
Omori 聡 (JP)
Download PDF:
Claims: