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Title:
ILLUMINATION OPTICAL SYSTEM, ALIGNER, AND PROCESS FOR FABRICATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/041522
Kind Code:
A1
Abstract:
Damage to optical members caused by excessive condensation of the light passed through a plurality of optical elements in a spatial light modulator is avoided.  An illumination optical system (IL), for illuminating a surface (M) to be illuminated based on the light from a light source (LS), comprises a spatial light modulator (4) having a plurality of optical elements arranged two-dimensionally and being driven individually, a detection section (DT) for detecting information about the drive state of the plurality of optical elements in the spatial light modulator, and a control section (CR) which determines, based on the information from the detection section, the possibility of excessive condensation of light on one point on a predetermined surface (6a) which is located at an optically Fourier transform position with respect to the surface where the plurality of optical elements are arranged on the rear side of the spatial light modulator, and thereby blocks or attenuates the propagation of the light toward the predetermined surface.

Inventors:
TANITSU Osamu (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
谷津 修 (〒31 東京都千代田区丸の内三丁目2番3号 株式会社ニコン内 Tokyo, 〒1008331, JP)
TANAKA Hirohisa (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
Application Number:
JP2009/064653
Publication Date:
April 15, 2010
Filing Date:
August 21, 2009
Export Citation:
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Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目2番3号 Tokyo, 〒1008331, JP)
TANITSU Osamu (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
谷津 修 (〒31 東京都千代田区丸の内三丁目2番3号 株式会社ニコン内 Tokyo, 〒1008331, JP)
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
YAMAGUCHI Takao (Daiichi Bldg, 10 Kanda-tsukasacho 2-chome, Chiyoda-k, Tokyo 48, 〒1010048, JP)
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