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Patent Searching and Data


Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE SYSTEM AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/040488
Kind Code:
A1
Abstract:
Disclosed is an illumination optical system which comprises: an optical integrator element that is provided with a first element group (230A) defining a first illumination condition and a second element group (230B) defining a second illumination condition that is different from the first illumination condition; and an illumination device (40) that selectively direct light to the first element group or the second element group.

Inventors:
OSHINO Tetsuya (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
押野 哲也 (〒31 東京都千代田区有楽町一丁目12番1号 株式会社ニコン内 Tokyo, 〒1008331, JP)
Application Number:
JP2010/066987
Publication Date:
April 07, 2011
Filing Date:
September 29, 2010
Export Citation:
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Assignee:
NIKON CORPORATION (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区有楽町一丁目12番1号 Tokyo, 〒1008331, JP)
OSHINO Tetsuya (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
SHIGA Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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