Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE SYSTEM AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/040488
Kind Code:
A1
Abstract:
Disclosed is an illumination optical system which comprises: an optical integrator element that is provided with a first element group (230A) defining a first illumination condition and a second element group (230B) defining a second illumination condition that is different from the first illumination condition; and an illumination device (40) that selectively direct light to the first element group or the second element group.
Inventors:
OSHINO TETSUYA (JP)
KAWABE YOSHIO (JP)
KAWABE YOSHIO (JP)
Application Number:
PCT/JP2010/066987
Publication Date:
April 07, 2011
Filing Date:
September 29, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
OSHINO TETSUYA (JP)
KAWABE YOSHIO (JP)
OSHINO TETSUYA (JP)
KAWABE YOSHIO (JP)
International Classes:
H01L21/027; G02B19/00; G03F7/20
Foreign References:
| JP2008258605A | 2008-10-23 | |||
| JP2008135743A | 2008-06-12 | |||
| JP2006253487A | 2006-09-21 | |||
| JP2006216917A | 2006-08-17 | |||
| JP2005337889A | 2005-12-08 | |||
| JP2002353105A | 2002-12-06 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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