Title:
ILLUMINATION OPTICAL SYSTEM, REFLECTION PROPERTY MEASUREMENT APPARATUS AND ILLUMINATION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/142107
Kind Code:
A1
Abstract:
Disclosed is an illumination optical system which makes it possible to decrease the rate of the change in the illumination that depends on the variation in the distance between the illumination optical system and the light source, even if a light source having a non-Lambertian light distribution property is employed. A light source (2) is located such that the distance (D1) between the light source (2) and a normal line (1n) is equal to the distance (D2) between the light source (2) and a sample surface (1) and that a light distribution main axis (2x) of the light source (2) is inclined at a predetermined offset angle (δ) with respect to a normal line (2n) which is normal to the sample surface (1) and passes through the light source (2). The offset angle (δ) is set such that the rate of the change in illumination with a non-Lambertian light distribution at an angle of (45°-δ) with respect to the light distribution main axis (2x) is equal to that in illumination with the Lambertian light distribution at an angle of 45° with respect to a light distribution main axis thereof.
Inventors:
IMURA KENJI (JP)
Application Number:
PCT/JP2011/002559
Publication Date:
November 17, 2011
Filing Date:
May 06, 2011
Export Citation:
Assignee:
KONICA MINOLTA SENSING INC (JP)
IMURA KENJI (JP)
IMURA KENJI (JP)
International Classes:
G01J3/10; G01J3/46
Foreign References:
| JP2006227012A | 2006-08-31 | |||
| JP2010281808A | 2010-12-16 | |||
| JPS6013229A | 1985-01-23 | |||
| JPS5346074A | 1978-04-25 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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Claims: