Title:
ILLUMINATION SYSTEM FOR OPTICAL INSPECTION
Document Type and Number:
WIPO Patent Application WO2004031741
Kind Code:
A3
Abstract:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Inventors:
NAFTALI RON (IL)
GUETTA AVISHAY (IL)
FELDMAN HAIM (IL)
SHOHAM DORON (IL)
BLAI GIL (IL)
GUETTA AVISHAY (IL)
FELDMAN HAIM (IL)
SHOHAM DORON (IL)
BLAI GIL (IL)
Application Number:
PCT/US2003/028054
Publication Date:
January 12, 2006
Filing Date:
September 08, 2003
Export Citation:
Assignee:
APPLIED MATERIALS ISRAEL LTD (IL)
APPLIED MATERIALS INC (US)
NAFTALI RON (IL)
GUETTA AVISHAY (IL)
FELDMAN HAIM (IL)
SHOHAM DORON (IL)
BLAI GIL (IL)
APPLIED MATERIALS INC (US)
NAFTALI RON (IL)
GUETTA AVISHAY (IL)
FELDMAN HAIM (IL)
SHOHAM DORON (IL)
BLAI GIL (IL)
International Classes:
G01N21/47; G01N21/88; G01N21/95; G01N21/956; G02B27/48; (IPC1-7): G02B27/48; G01N21/95
Foreign References:
| US6249381B1 | 2001-06-19 | |||
| EP0589179A1 | 1994-03-30 | |||
| US5729374A | 1998-03-17 | |||
| US20020067478A1 | 2002-06-06 | |||
| US4619508A | 1986-10-28 | |||
| US20010052975A1 | 2001-12-20 | |||
| US20010030296A1 | 2001-10-18 | |||
| DE4434699A1 | 1996-04-04 |
Other References:
See also references of EP 1576355A2
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