IMAGE ACQUISITION DEVICE, IMAGE ACQUISITION METHOD, AND INSPECTION APPARATUS

WIPO Patent Application WO/2019/150692

A1

The present invention reduces the time required to acquire images of a target object for each of N (N is a natural number of 2 or more) light sources having different emission directions, wherein the images are acquired while sequentially irradiating the target object with light from each of the light sources. The present invention is provided with: a moving unit for moving a target object in a first direction; an imaging unit having N partial imaging areas in which the N partial areas of the target object that extend in a second direction crossing the first direction while being adjacent to each other in the first direction can be captured; a light source switching control unit which, each time the target object moves in the first direction by one partial imaging area, sequentially switches the light irradiating the target object; a storage unit which, each time the light is switched, stores as a partial image an image of the partial area captured and acquired by the imaging unit; and a target image acquisition unit which acquires N sheets of images of the target object by compositing, for each of the light sources, a portion of the plurality of partial images stored in the storage unit.

SASA YASUSHI (JP)

PCT/JP2018/041488

August 08, 2019

November 08, 2018

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SCREEN HOLDINGS CO LTD (JP)

G01N21/89

JP2017009533A	2017-01-12
JP2011095171A	2011-05-12
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JP2016035405A	2016-03-17
JP2006329919A	2006-12-07
JP2015125089A	2015-07-06
JP2015232485A	2015-12-24
US7777897B1	2010-08-17

FURIKADO, Shoichi et al. (JP)

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