Title:
IMAGE DETECTION METHOD, IMAGE DETECTION APPARATUS, AND WAFER TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2002/077922
Kind Code:
A1
Abstract:
An image detection apparatus (20) detects from an input image a first region similar portion similar to a first region containing a predetermined first mark. The image detection apparatus (20) includes first region candidate portion detection means (24) for detecting from an input image a first region candidate portion containing an image similar to the first mark and second region candidate portion detection means (32) having information on an image of a second region whose relative position to the first region is known, deciding from the input image a second region candidate portion in accordance with the relative position, and detecting whether the second region candidate portion is matched with the information on the image of the second region.
Inventors:
ICHIKAWA MASAYOSHI (JP)
YAMAGUCHI TAKAHIRO (JP)
YAMAGUCHI TAKAHIRO (JP)
Application Number:
PCT/JP2002/002887
Publication Date:
October 03, 2002
Filing Date:
March 26, 2002
Export Citation:
Assignee:
ADVANTEST CORP (JP)
ICHIKAWA MASAYOSHI (JP)
YAMAGUCHI TAKAHIRO (JP)
ICHIKAWA MASAYOSHI (JP)
YAMAGUCHI TAKAHIRO (JP)
International Classes:
G03F7/20; G03F9/00; G06T1/00; G06T7/00; G06T7/40; G06T7/60; H01L21/027; (IPC1-7): G06T7/00
Foreign References:
| JPH06274601A | 1994-09-30 | |||
| JPH04307682A | 1992-10-29 |
Attorney, Agent or Firm:
Ryuka, Akihiro (Shinjuku 1-chome Shinjuku-ku, Tokyo, JP)
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