IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD

Title:

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD

Document Type and Number:

WIPO Patent Application WO/2011/065374

Kind Code:

A1

Abstract:

Provided is an image-forming optical system that is a catoptric optical system applicable to an exposure apparatus employing, for example, EUV light and has an increased numerical aperture while enabling optical path separation of light fluxes. In the catoptric image-forming optical system (6) which forms an image of a first surface (4) onto a second surface (7), the numerical aperture at the second surface side with respect to a first direction (X direction) on the second surface is 1.1 times larger than at the second surface side with respect to a second direction (Y direction) that intersects the first direction on the second surface. The catoptric image-forming optical system has an aperture stop (AS) to regulate the numerical aperture of the second surface side, and the aperture stop has an oval-shaped aperture, wherein the length of the oval-shaped aperture in a major axis direction (X direction) is 1.1 times larger than in a minor axis direction (Y direction).

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Inventors:

KOMATSUDA HIDEKI (JP)

Application Number:

PCT/JP2010/070919

Publication Date:

June 03, 2011

Filing Date:

November 24, 2010

Export Citation:

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Assignee:

NIKON CORP (JP)
KOMATSUDA HIDEKI (JP)

International Classes:

G02B17/08; G02B13/14; G02B13/18; G02B13/24; G03F7/20; H01L21/027

Foreign References:

JP2009253048A	2009-10-29
JP2003045784A	2003-02-14
JP2009532725A	2009-09-10
US6452661B1	2002-09-17

Other References: