IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE MICROSCOPE, SAMPLE OBSERVATION METHOD, AND OBSERVING DEVICE

Title:

IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE MICROSCOPE, SAMPLE OBSERVATION METHOD, AND OBSERVING DEVICE

Document Type and Number:

WIPO Patent Application WO/2011/114644

Kind Code:

A1

Abstract:

Disclosed are an image generating method and device such that a high-resolution SEM image is obtained while suppressing damage caused by SEM imaging to a sample as a result of irradiation of an electron beam in relation to image pick-up of a semiconductor pattern using SEM. A plurality of domains (similar domains) which have similarly shaped patterns are extracted from a low-resolution SEM image which is picked up while suppressing the irradiation energy of electron beam, whereby a single high-resolution image of the patterns is generated from the image data in the plurality of the domains via an image restoring process. Further, the similar domains, and the SEM imaging position and the imaging range that allow the image restoring process to be performed are determined using design data.

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Inventors:

KOTAKI, Go (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
上瀧　剛 (〒17 神奈川県横浜市戸塚区吉田町２９２番地　株式会社日立製作所　生産技術研究所内 Kanagawa, 〒2440817, JP)
MIYAMOTO, Atsushi (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
宮本　敦 (〒17 神奈川県横浜市戸塚区吉田町２９２番地　株式会社日立製作所　生産技術研究所内 Kanagawa, 〒2440817, JP)

Application Number:

JP2011/001275

Publication Date:

September 22, 2011

Filing Date:

March 04, 2011

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Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishishimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
KOTAKI, Go (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
上瀧　剛 (〒17 神奈川県横浜市戸塚区吉田町２９２番地　株式会社日立製作所　生産技術研究所内 Kanagawa, 〒2440817, JP)
MIYAMOTO, Atsushi (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)

International Classes:

G01B15/04; G01N23/225

Attorney, Agent or Firm:

INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)

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