IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE MICROSCOPE, SAMPLE OBSERVATION METHOD, AND OBSERVING DEVICE

WIPO Patent Application WO/2011/114644

A1

Disclosed are an image generating method and device such that a high-resolution SEM image is obtained while suppressing damage caused by SEM imaging to a sample as a result of irradiation of an electron beam in relation to image pick-up of a semiconductor pattern using SEM. A plurality of domains (similar domains) which have similarly shaped patterns are extracted from a low-resolution SEM image which is picked up while suppressing the irradiation energy of electron beam, whereby a single high-resolution image of the patterns is generated from the image data in the plurality of the domains via an image restoring process. Further, the similar domains, and the SEM imaging position and the imaging range that allow the image restoring process to be performed are determined using design data.

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KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
NAKAHIRA KENJI (JP)
HIROI TAKASHI (JP)

PCT/JP2011/001275

September 22, 2011

March 04, 2011

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HITACHI HIGH TECH CORP (JP)
KOTAKI GO (JP)
MIYAMOTO ATSUSHI (JP)
NAKAHIRA KENJI (JP)
HIROI TAKASHI (JP)

G01B15/04; G01N23/225

JP2006107046A	2006-04-20
JP2009245674A	2009-10-22
JP2010025836A	2010-02-04
JP2008134212A	2008-06-12

INOUE, Manabu et al. (JP)
Manabu Inoue (JP)

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