Title:
IMAGE NOISE REDUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/223789
Kind Code:
A1
Abstract:
The present invention relates to an image noise reduction method for reducing noise on an image generated by means of a scanning electron microscope. The image noise reduction method involves: generating a sample reference image by means of a scanning electron microscope; adding artificial noise to the reference image and generating an artificial noise image; generating an artificial low quality image by applying, to the artificial noise image, an anisotropic filter configured to stretch the artificial noise in an electron beam scan direction of the scanning electron microscope; creating a denoising model by executing machine-learning by using training data including the reference image and artificial low quality image; generating an image of an inspection and shape measurement target workpiece of a semiconductor device by means of the scanning electron microscope; inputting the image of a workpiece to the denoising model; and outputting a denoised image from the denoising model.
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Inventors:
MORI TAIHEI (JP)
Application Number:
PCT/JP2023/016445
Publication Date:
November 23, 2023
Filing Date:
April 26, 2023
Export Citation:
Assignee:
TASMIT INC (JP)
International Classes:
H01J37/24; G06T5/00; G06T7/00; G06V10/30; H01J37/28
Foreign References:
| JP2019008599A | 2019-01-17 | |||
| JP2020184333A | 2020-11-12 | |||
| JP2019110120A | 2019-07-04 | |||
| CN112819739A | 2021-05-18 | |||
| US20160171727A1 | 2016-06-16 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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