Title:
IMAGE PROCESSING METHOD, IMAGE PROCESSING SYSTEM, AND X-RAY COMPUTED TOMOGRAPHY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/008512
Kind Code:
A1
Abstract:
Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, and improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means, in an electron microscope having an imaging device and a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tilted image; a means for aligning the position of said tilted image; a means for generating an initial reconstructed image based on said tilted image; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted image and the projected images; a means for determining the processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image according to each of the abovementioned priorities.
Inventors:
KUBO Takashi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
久保 貴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
HASHIMOTO Takahito (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
橋本 隆仁 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
久保 貴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
HASHIMOTO Takahito (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
橋本 隆仁 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/066035
Publication Date:
January 19, 2012
Filing Date:
July 14, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
KUBO Takashi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
久保 貴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
HASHIMOTO Takahito (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
KUBO Takashi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
久保 貴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
HASHIMOTO Takahito (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/22; G01N23/04
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
Claims:
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