Title:
IMAGE-TYPE ELECTRON SPIN ANALYSER AND ELECTRON OPTICAL SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/047986
Kind Code:
A1
Abstract:
An image-type electron spin analyser, comprising: an electron optical system, a scattering target (4) and a two-dimensional image-type electron detector (5), the electron optical system comprising a non-axisymmetric lens group and a magnetic field (6), the non-axisymmetric lens group being matched with the magnetic field (6) to enable movement tracks of incoming electrons and outgoing electrons to be mutually separated in order to increase the geometric degree of freedom of various parts of the spin analyser. The incoming electrons are deflected and imaged to a specific plane corresponding to the scattering target (4), and the electrons are imaged to the two-dimensional image-type electron detector (5), after being scattered by the scattering target (4), to form a two-dimensional electron intensity image, thereby implementing multi-channel measurement of electron spin. The introduction of non-axisymmetric lenses compensates for the asymmetry of electron optical properties of the magnetic field (6) on vertical and parallel magnetic field directions, reduces optical system aberrations, and enables electron optical system debugging to be simpler.
Inventors:
QIAO SHAN (CN)
Application Number:
PCT/CN2018/111358
Publication Date:
March 14, 2019
Filing Date:
October 23, 2018
Export Citation:
Assignee:
SHANGHAI INST MICROSYSTEM & INFORMATION TECH CAS (CN)
International Classes:
G01T1/32
Foreign References:
| CN104345331A | 2015-02-11 | |||
| CN1340843A | 2002-03-20 | |||
| CN1336542A | 2002-02-20 | |||
| CN1322004A | 2001-11-14 | |||
| CN1697117A | 2005-11-16 | |||
| JP2011059057A | 2011-03-24 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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