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Title:
IMAGING DEVICE, METHOD FOR CONTROLLING IMAGING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/053969
Kind Code:
A1
Abstract:
This imaging device has a detection means that detects the position of the surface of an object by receiving second electromagnetic waves having a wavelength shorter than that of first electromagnetic waves, a focusing means that condenses the first electromagnetic waves that have been reflected by the object, a control means that controls the focusing means so as to focus at a position based on the position of the surface, and an imaging means that captures an image of the object through use of the first light condensed by the focusing means.

Inventors:
MIZUTANI FUMIAKI (JP)
IBA JUN (JP)
Application Number:
PCT/JP2020/028539
Publication Date:
March 25, 2021
Filing Date:
July 22, 2020
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
G01N21/17; G01J1/02; G01N21/3581; G01V3/12; G02B7/28; G02B7/34; G02B7/36; G03B13/36; G03B15/00; G03B15/02; G03B15/05; H04N5/225; H04N5/232
Domestic Patent References:
WO2012073722A12012-06-07
WO2017141746A12017-08-24
Foreign References:
CN109655931A2019-04-19
JP2011214874A2011-10-27
JPH11295826A1999-10-29
JP2006234587A2006-09-07
JP2016035394A2016-03-17
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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