Title:
IMAGING DEVICE, METHOD FOR CONTROLLING IMAGING DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/053969
Kind Code:
A1
Abstract:
This imaging device has a detection means that detects the position of the surface of an object by receiving second electromagnetic waves having a wavelength shorter than that of first electromagnetic waves, a focusing means that condenses the first electromagnetic waves that have been reflected by the object, a control means that controls the focusing means so as to focus at a position based on the position of the surface, and an imaging means that captures an image of the object through use of the first light condensed by the focusing means.
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Inventors:
MIZUTANI FUMIAKI (JP)
IBA JUN (JP)
IBA JUN (JP)
Application Number:
PCT/JP2020/028539
Publication Date:
March 25, 2021
Filing Date:
July 22, 2020
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G01N21/17; G01J1/02; G01N21/3581; G01V3/12; G02B7/28; G02B7/34; G02B7/36; G03B13/36; G03B15/00; G03B15/02; G03B15/05; H04N5/225; H04N5/232
Domestic Patent References:
WO2012073722A1 | 2012-06-07 | |||
WO2017141746A1 | 2017-08-24 |
Foreign References:
CN109655931A | 2019-04-19 | |||
JP2011214874A | 2011-10-27 | |||
JPH11295826A | 1999-10-29 | |||
JP2006234587A | 2006-09-07 | |||
JP2016035394A | 2016-03-17 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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