Title:
IMAGING DEVICE AND IMAGING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/170942
Kind Code:
A1
Abstract:
This imaging device (10) comprises a substrate (1), a first optical system (2), and an imaging unit (3). A subject (110) is placed on the substrate (1). The first optical system (2) irradiates the subject (110) using a first emitted light (L1). The imaging unit (3) images an interferogram of a first reflected light (L2) and a second reflected light (L3). The first reflected light (L2) is obtained by the first emission light (L1) being reflected by a first interface (F1) conforming to the outer surface of the subject (110). The second reflected light (L3) is obtained by the first emission light being reflected by a second interface (F2) between the subject (110) and the substrate (1).
Inventors:
MORIYAMA MASAKI (JP)
ISHIZAWA NAOYA (JP)
KOBAYASHI RYO (JP)
TAKUBO MAKIKO (JP)
HAYASHI SERI (JP)
TANAKA SHUHEI (JP)
MURAKAMI MASATAKA (JP)
HOSHINO TETSURO (JP)
IWASA AKIO (JP)
MIMURA MASAFUMI (JP)
FUKUTAKE NAOKI (JP)
NOZAKI KIYOSHI (JP)
ISHIZAWA NAOYA (JP)
KOBAYASHI RYO (JP)
TAKUBO MAKIKO (JP)
HAYASHI SERI (JP)
TANAKA SHUHEI (JP)
MURAKAMI MASATAKA (JP)
HOSHINO TETSURO (JP)
IWASA AKIO (JP)
MIMURA MASAFUMI (JP)
FUKUTAKE NAOKI (JP)
NOZAKI KIYOSHI (JP)
Application Number:
PCT/JP2022/010954
Publication Date:
September 14, 2023
Filing Date:
March 11, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
C12M1/00; G02B21/36; G01B9/02; G01N15/00; G01N21/17
Domestic Patent References:
| WO2015085216A1 | 2015-06-11 | |||
| WO2015115471A1 | 2015-08-06 | |||
| WO2009063863A1 | 2009-05-22 |
Foreign References:
| JP2013253875A | 2013-12-19 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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