Title:
IMAGING DEVICE, IMAGING SYSTEM, AND IMAGING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/154625
Kind Code:
A1
Abstract:
The present invention effectively distinguishes the parts of a sample. An imaging device according to this embodiment is provided with a light detection unit for detecting light radiated from a sample irradiated by a light source with infrared light of a first wavelength and infrared light of a second wavelength and a control unit for adjusting the intensity of the infrared light of the first wavelength or infrared light of the second wavelength and generating a sample image on the basis of the detection results obtained by simultaneously irradiating the infrared light of the first wavelength and infrared light of the second wavelength onto the sample (fig. 1).
Inventors:
IKEHARA YUZURU (JP)
IKEHARA SANAE (JP)
TOTSU MASAHIRO (JP)
YANAGAWA TAKUYA (JP)
LIU ZHEN (JP)
IKEHARA SANAE (JP)
TOTSU MASAHIRO (JP)
YANAGAWA TAKUYA (JP)
LIU ZHEN (JP)
Application Number:
PCT/JP2017/006346
Publication Date:
August 30, 2018
Filing Date:
February 21, 2017
Export Citation:
Assignee:
AIST (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
G01N21/27; G01J1/38; G01J1/42; G01N21/01; G01N21/359
Domestic Patent References:
| WO2014192876A1 | 2014-12-04 | |||
| WO2016103824A1 | 2016-06-30 |
Foreign References:
| JP2006250759A | 2006-09-21 | |||
| JP2017015489A | 2017-01-19 | |||
| JP2013101109A | 2013-05-23 | |||
| JP2014169878A | 2014-09-18 | |||
| JP2011169735A | 2011-09-01 | |||
| US20040227906A1 | 2004-11-18 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
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