Title:
IMAGING DIELECTRIC SPECTROSCOPIC METHOD, DEVICE THEREFOR, AND SHUTTER MECHANISM FOR ELECTRON BEAM
Document Type and Number:
WIPO Patent Application WO/2022/196677
Kind Code:
A1
Abstract:
Provided is an imaging dielectric spectroscopic technology for obtaining mapping of a dielectric property in a specimen using electron beam holography. An interference image formed by an interference optical system is stroboscopically captured by, while periodically applying a stimulus with a repetition period T to a specimen (103) of a transmission electron microscope in which the interference optical system is installed, performing repeated exposures on a camera (105) for only a short time in synchronization with the period T, N interference images having different delays are obtained by changing the delay time of the exposure with respect to the stimulus in N ways, and frequency dependence of a complex dielectric constant is obtained by obtaining a reproduced image from each of the interference images by a computer (106).
Inventors:
IWASAKI YOH (JP)
Application Number:
PCT/JP2022/011544
Publication Date:
September 22, 2022
Filing Date:
March 15, 2022
Export Citation:
Assignee:
RIKEN (JP)
International Classes:
G03H5/00; G01N23/06; H01J37/147; H01J37/22; H01J37/26; H01J37/295
Foreign References:
| JP2011154793A | 2011-08-11 | |||
| JPH10223717A | 1998-08-21 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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