Title:
IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/052961
Kind Code:
A1
Abstract:
Provided is a reflection optical system applicable to an exposure apparatus using, for instance, EUV rays, specifically a high-performance imaging optical system wherein the distance between a first reflection mirror and an object surface is relatively largely ensured on an axis and aberration is excellently corrected. An imaging optical system (6) which forms an image formed on a first surface (4) on a second surface (7) is provided with a first reflection mirror (M1), a second reflection mirror (M2), a third reflection mirror (M3), a fourth reflection mirror (M4), a fifth reflection mirror (M5) and a sixth reflection mirror (M6) in the light incoming order. The first reflection mirror is disposed closer to the second surface compared with the fourth reflection mirror, and the third reflection mirror is disposed closer to the second surface compared with the second reflection mirror. The second reflection mirror and the third reflection mirror are disposed between a first defining surface which defines the reflection surface of the first reflection mirror and a fourth defining surface which defines the reflection surface of the fourth reflection mirror. The entrance pupil of the imaging optical system is positioned on the opposite side to the imaging optical system with the first surface therebetween.
Inventors:
KOMATSUDA HIDEKI (JP)
Application Number:
PCT/JP2009/064104
Publication Date:
May 14, 2010
Filing Date:
August 10, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
KOMATSUDA HIDEKI (JP)
KOMATSUDA HIDEKI (JP)
International Classes:
G02B17/00; H01L21/027
Domestic Patent References:
| WO2006119977A1 | 2006-11-16 |
Foreign References:
| JP2004170869A | 2004-06-17 | |||
| JP2005122132A | 2005-05-12 | |||
| JP2003015040A | 2003-01-15 | |||
| JP2006245147A | 2006-09-14 | |||
| JP2008158211A | 2008-07-10 | |||
| JP2006243197A | 2006-09-14 | |||
| JP2006245148A | 2006-09-14 | |||
| JP2005101591A | 2005-04-14 | |||
| JP2005086007A | 2005-03-31 |
Attorney, Agent or Firm:
YAMAGUCHI TAKAO (JP)
Takao Yamaguchi (JP)
Takao Yamaguchi (JP)
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