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Patent Searching and Data


Title:
IMAGING OPTICAL SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/034995
Kind Code:
A3
Abstract:
An imaging optical system (9) for a projection exposure system has at least one anamorphically imaging optical element (M1 to M6). This allows a complete illumination of an image field in a first direction with a large object-side numerical aperture in this direction, without the extent of the reticle to be imaged having to be enlarged and without a reduction in the throughput of the projection exposure system occurring.

Inventors:
MANN, Hans-Jürgen (Katzenbachstrasse 49, Oberkochen, 73447, DE)
Application Number:
EP2011/065823
Publication Date:
May 18, 2012
Filing Date:
September 13, 2011
Export Citation:
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Assignee:
CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 2, Oberkochen, 73447, DE)
MANN, Hans-Jürgen (Katzenbachstrasse 49, Oberkochen, 73447, DE)
International Classes:
G02B13/08; G02B17/06; G03F7/20
Domestic Patent References:
WO2011065374A12011-06-03
Foreign References:
US3871748A1975-03-18
JP2002048977A2002-02-15
US5891806A1999-04-06
Attorney, Agent or Firm:
RAU, SCHNECK & HÜBNER (Königstrasse 2, Nürnberg, 90402, DE)
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