Title:
IMAGING PANEL AND X-RAY IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/002562
Kind Code:
A1
Abstract:
The purpose of the present invention is to suppress signal delay and signal transmission errors by keeping bias wiring from becoming thinner or breaking in an imaging panel and x-ray imaging device. A second contact hole (CH2) electrically connects bias wiring (16) and an electrode (43) of a photodiode (15), and is formed through a second interlayer insulation film (44) and a light-sensitive resin layer (45). In the second contact hole (CH2), the surface area of the region (a2) of the opening in the light-sensitive resin layer (45) is formed smaller than that of the region (a1) of the opening in the second interlayer insulation film (44).
Inventors:
TOMIYASU KAZUHIDE
MORI SHIGEYASU
MORI SHIGEYASU
Application Number:
PCT/JP2015/067882
Publication Date:
January 07, 2016
Filing Date:
June 22, 2015
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L27/146; G01T1/20; H01L27/144; H01L29/786; H01L31/10; H04N5/32; H04N5/374
Foreign References:
| JP2014078651A | 2014-05-01 | |||
| JP2006253481A | 2006-09-21 | |||
| JP2011159908A | 2011-08-18 | |||
| JP2009212120A | 2009-09-17 |
Attorney, Agent or Firm:
KAWAKAMI Keiko et al. (JP)
Keiko Kawakami (JP)
Keiko Kawakami (JP)
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