Title:
IMPEDANCE MATCHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/110098
Kind Code:
A1
Abstract:
An impedance matching device provided with a variable reactor having a main winding and a control winding that are wound around a core, wherein a generated magnetic field in the core is an alternating-current magnetic field having a magnitude exceeding a magnetic field required to settle a deviation between a control target value for impedance matching and a feedback value, and by changing the magnetic field magnitude of the generated magnetic field by changing the current value of a control current to be passed through the control winding of the variable reactor, the inductance of the variable reactor is controlled to a predetermined inductance to thereby perform impedance matching. Response delay in impedance matching is reduced by reducing response delay in the inductance change of the variable reactor.
Inventors:
YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
MORI SADAO (JP)
OHNO TADAHARU (JP)
AIKAWA SATOSHI (JP)
MORI SADAO (JP)
OHNO TADAHARU (JP)
Application Number:
PCT/JP2016/054221
Publication Date:
June 29, 2017
Filing Date:
February 15, 2016
Export Citation:
Assignee:
KYOSAN ELECTRIC MFG (JP)
International Classes:
H03H7/38; H01F21/08
Foreign References:
| JP2000165175A | 2000-06-16 | |||
| JP2005039266A | 2005-02-10 | |||
| JP2010537453A | 2010-12-02 | |||
| JP2004104493A | 2004-04-02 | |||
| JPH0855733A | 1996-02-27 | |||
| JP2012234769A | 2012-11-29 |
Other References:
See also references of EP 3309962A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (JP)
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