Title:
IMPEDANCE MATCHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/062109
Kind Code:
A1
Abstract:
Provided is an impedance-matching device that matches impedance between a high-frequency power source and a load. The impedance-matching device according to the present invention is provided with: a matching circuit having variable capacitors in which capacitance is adjusted by turning on/off a plurality of switches; a switch control unit which performs control so as to bring the state of the switches of the variable capacitors in line with a target state in order to adjust the capacitance of the variable capacitors; and a switch state determination unit which determines whether or not the switches are in a state where temperature increase needs to be suppressed. The switch control unit is configured to perform control, in the case when it is determined by the switch state determination unit that the switches of the variable capacitors are in a state where temperature increase needs to be suppressed, so as to suppress temperature increase of the switches by stopping the changing of the state of the switches for a preset period of time.
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Inventors:
MORII TATSUYA (JP)
NAKAHAMA MASAYUKI (JP)
NAKAHAMA MASAYUKI (JP)
Application Number:
PCT/JP2017/034565
Publication Date:
April 05, 2018
Filing Date:
September 25, 2017
Export Citation:
Assignee:
DAIHEN CORP (JP)
International Classes:
H03H7/40; H05H1/46
Domestic Patent References:
| WO2010116897A1 | 2010-10-14 |
Foreign References:
| JP2012142285A | 2012-07-26 | |||
| JP2004208450A | 2004-07-22 | |||
| JP2014505983A | 2014-03-06 | |||
| JP2009021785A | 2009-01-29 | |||
| JPS61199432A | 1986-09-03 |
Attorney, Agent or Firm:
KIKUCHI, Shinichi et al. (JP)
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