Title:
IMPEDANCE MATCHING METHOD AND IMPEDANCE MATCHING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/046753
Kind Code:
A1
Abstract:
Provided are an impedance matching device and an impedance matching method. A variable reactance impedance matching network is disposed between a variable frequency RF power source varying a driving frequency (f) and a load. An impedance matching method of the variable reactance impedance matching network includes controlling variation amount of capacitance or reactance of a variable reactive component of the impedance matching network as a function of a difference between a target driving frequency ft and the driving frequency.
Inventors:
KIM JAE-HYUN (KR)
LEE SANG-WON (KR)
LEE SANG-WON (KR)
Application Number:
PCT/KR2014/007522
Publication Date:
April 02, 2015
Filing Date:
August 13, 2014
Export Citation:
Assignee:
PLASMART INC (KR)
International Classes:
H03H7/38
Domestic Patent References:
| WO2013088723A1 | 2013-06-20 | |||
| WO2012159620A2 | 2012-11-29 |
Foreign References:
| KR20080094155A | 2008-10-23 | |||
| KR20130047532A | 2013-05-08 | |||
| KR20070099294A | 2007-10-09 | |||
| KR100429930B1 | 2004-06-16 |
Other References:
None
See also references of EP 3053268A4
See also references of EP 3053268A4
Attorney, Agent or Firm:
LEE, Pyung-Woo (Sapyeong-daeroSeocho-gu, Seoul 137-806, KR)
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