Title:
IMPRINT DEVICE AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/012488
Kind Code:
A1
Abstract:
An imprint device molds an imprint material on a substrate using a mold. The imprint device is provided with: a movable stage which holds the substrate; a supply unit which ejects the imprint material; and a control unit which causes the supply unit to eject the imprint material while causing the stage to move so that the imprint material is supplied onto the substrate. The control unit, on the basis of characteristic information indicating the relationship between an ejected amount of the imprint material from the supply unit and the position in which the ejected amount of the imprint material is disposed on a target object, controls the ejection of the imprint material from the supply unit so that a target amount of the imprint material is disposed in a target position on the substrate.
Inventors:
OTA JUN (JP)
Application Number:
PCT/JP2017/025238
Publication Date:
January 18, 2018
Filing Date:
July 11, 2017
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02; B81C1/00
Foreign References:
| JP2016004794A | 2016-01-12 | |||
| JP2012054322A | 2012-03-15 | |||
| JP2016092270A | 2016-05-23 | |||
| JP2016027623A | 2016-02-18 | |||
| JP2014103189A | 2014-06-05 | |||
| JP2013065624A | 2013-04-11 | |||
| JP2011199052A | 2011-10-06 |
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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