Title:
IMPRINT DEVICE AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/025756
Kind Code:
A1
Abstract:
This imprint device has: a processing part that forms an imprint material pattern on a substrate by using a mold; a chamber that houses the processing part and that has a first gate to which a first storage part that stores a substrate yet to be processed by the processing part is connected and a second gate to which a second storage part that stores the substrate processed by the processing part is connected; and a control part that prohibits the first gate from being opened until a prescribed time elapses after the substrate, on which the pattern has been formed by the processing part, has been stored in the second storage part and the second gate has been closed.
Inventors:
YAMAMOTO KIYOHITO (JP)
Application Number:
PCT/JP2017/027354
Publication Date:
February 08, 2018
Filing Date:
July 28, 2017
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| WO2002021583A1 | 2002-03-14 |
Foreign References:
| JPH07211761A | 1995-08-11 | |||
| JPH08291384A | 1996-11-05 | |||
| JPH08340037A | 1996-12-24 | |||
| JP2007181938A | 2007-07-19 | |||
| JP2015023151A | 2015-02-02 |
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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